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by dgross
July 19th, 2013, 10:53 am
Forum: Other Keithley Instrument Products
Topic: Impedance Calibration Standard?
Replies: 1
Views: 10763

Impedance Calibration Standard?

I'm having some issues resolving a discrepancy between a Keithley 590 CV meter and an Agilent E4980A Precision LCR meter. I'm doing low-frequency measurements of wafer-level devices in the 100-200 fF range. There is a discrepancy of some 100 fF between the two instruments that doesn't seem to do be ...

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