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Could the keithley cause this problem? anyway to test it?
There's a possibility that during your power up cycle/sequence of the instrument a transient happens, which could be higher than 0.1V. Is there a way to debug your test(s) using a scope maybe to see whether there's a spike going on?
Unfortunately, I am having the same problem. I talked so many people and it seems to be a common issue with the 2400 series. The voltage spikes can reach more than 10V while sweeping from positive to negative voltages (checked with oscilloscope).
Mu question is: what do you recommend as a surge protection? Maybe connect a large resistor or capacitor across the input/output and connect the DUT in parallel?
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