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Low current measurement 2634B

Models 2601, 2602, 2611, 2612, 2635, 2636
Models 2601A, 2602A, 2611A, 2612A, 2635A, 2636A
Models 2601B, 2602B, 2604B, 2611B, 2612B, 2614B, 2634B, 2635B, 2636B
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Posts: 3
Joined: April 2nd, 2013, 6:03 am
Country: Switzerland

Low current measurement 2634B

Post by smkilani » April 2nd, 2013, 6:09 am


We have recently purchased a Keithley 2634B for measuring dark current of semiconductor material.

Could somebody perhaps describe to me the setup that we might need in order to measure current down to 1fA?

The SMU will be used to provide the biasing voltage and we simply like to measure the current being drawn from the source.

The DUT at this stage is a diode.

Thank you


Jane S
Keithley Applications
Keithley Applications
Posts: 114
Joined: November 10th, 2010, 5:45 pm
Country: United States

Re: Low current measurement 2634B

Post by Jane S » April 17th, 2013, 4:45 pm

The attached file is the low current measurement application note. In the last page, it talks about the specifics of dark current measurement including set-up and test fixtures.

Low Current Measurement
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