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I am trying to measure resistance of polymeric thin film coated on top of glass substrate using 4 point probe setup and a Keithley 2400 model as SMU. The polymeric thin film resistance is relatively high (~ MOhm --> GOhm). Firstly, I tried auto source but keep overflowing. Then, I switched to manual source to adjust source current; however, the R values started out as GOhm and slowly decrease to MOhm without leveling off.
I also tried measuring a 1GOhm and 3 GOhm resistors and obtained their correct values.
Ideally, 2 point probe would work better for high resistance and low current sample, but I would like to stay with the 4 point probe set up since the contact resistance is relatively large in this case. Therefore, my question is what can I tweak/adjust in this setup to arrive at a stable/reliable reading?
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